• Introduces the theory and technology of micro/nano fabrication. Includes lectures and laboratory sessions on processing techniques: wet and dry etching, chemical and physical deposition, lithography, thermal processes, packaging, and device and materials characterization. Homework uses process simulation tools to build intuition about higher order effects. Emphasizes interrelationships between material properties and processing, device structure, and the electrical, mechanical, optical, chemical or biological behavior of devices. Students fabricate solar cells, and a choice of MEMS cantilevers or microfluidic mixers. Students formulate their own device idea, either based on cantilevers or mixers, then implement and test their designs in the lab. Students engage in extensive written and oral communication exercises. Course provides background for research work related to micro/nano fabrication. Enrollment limited.

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